1/18/2010	10:05:16 AM	Main Vac valve closed
1/18/2010	10:05:26 AM	Bypass solenoid MFC set to  760.000000
1/18/2010	10:05:31 AM	Helium valve opened
1/18/2010	10:06:53 AM	Helium valve closed
1/18/2010	10:06:57 AM	Bypass valve closed
1/18/2010	10:10:11 AM	Bypass solenoid MFC set to  0.000000
1/18/2010	10:10:12 AM	Bypass valve opened
1/18/2010	10:10:46 AM	Main Vac valve opened
1/18/2010	10:35:17 AM	Main Vac valve closed
1/18/2010	10:35:21 AM	Bypass valve closed
1/18/2010	10:35:33 AM	Bypass valve opened
1/18/2010	10:35:40 AM	Bypass solenoid MFC set to  0.000000
1/18/2010	10:35:46 AM	Main Vac valve opened
1/18/2010	11:55:41 AM	Main Vac valve closed
1/18/2010	11:55:53 AM	Bypass solenoid MFC set to  760.000000
1/18/2010	11:56:01 AM	Helium valve opened
1/18/2010	11:57:18 AM	Bypass valve closed
1/18/2010	11:57:22 AM	Helium valve closed
1/18/2010	12:00:28 PM	Bypass solenoid MFC set to  0.000000
1/18/2010	12:00:29 PM	Bypass valve opened
1/18/2010	12:00:52 PM	Main Vac valve opened
1/18/2010	1:31:32 PM	Bypass valve closed
1/18/2010	1:31:34 PM	Bypass valve opened
1/18/2010	1:31:43 PM	H2 MFC set to  500.000000
1/18/2010	1:31:58 PM	Helium MFC set to  100.000000
1/18/2010	1:32:00 PM	Helium valve opened
1/18/2010	1:32:08 PM	Helium valve closed
1/18/2010	1:32:11 PM	Helium valve opened
1/18/2010	1:32:12 PM	Helium valve closed
1/18/2010	1:32:31 PM	SiCl4 MFC set to  325.000000
1/18/2010	1:32:49 PM	Bypass solenoid MFC set to  0.000000
1/18/2010	1:32:53 PM	Bypass solenoid MFC set to  760.000000
1/18/2010	1:34:12 PM	Main Vac valve closed
1/18/2010	1:34:15 PM	Helium valve opened
1/18/2010	1:34:32 PM	Helium MFC set to  500.000000
1/18/2010	1:38:47 PM	Helium valve closed
1/18/2010	1:38:48 PM	Bypass valve closed
1/18/2010	1:51:17 PM	Bypass solenoid MFC set to  0.000000
1/18/2010	1:51:19 PM	Bypass valve opened
1/18/2010	1:51:55 PM	Main Vac valve opened
1/18/2010	1:53:20 PM	Bypass valve closed
1/18/2010	1:53:21 PM	Main Vac valve closed
1/18/2010	1:55:15 PM	Main Vac valve opened
1/18/2010	1:55:16 PM	Bypass valve opened
1/18/2010	2:00:16 PM	Helium valve opened
1/18/2010	2:00:16 PM	Helium valve closed
1/18/2010	2:00:17 PM	Helium valve opened
1/18/2010	2:00:44 PM	Helium valve closed
1/18/2010	2:00:44 PM	Helium valve opened
1/18/2010	2:00:44 PM	Helium valve closed
1/18/2010	2:14:30 PM	Helium valve opened
1/18/2010	2:15:37 PM	Helium valve closed
1/18/2010	2:21:55 PM	Bypass valve closed
1/18/2010	2:21:56 PM	Main Vac valve closed
1/18/2010	2:22:06 PM	Bypass valve opened
1/18/2010	2:22:07 PM	Main Vac valve opened
1/18/2010	2:22:47 PM	Bypass valve closed
1/18/2010	2:22:48 PM	Main Vac valve closed
1/18/2010	2:23:44 PM	Bypass solenoid MFC set to  760.000000
1/18/2010	2:23:46 PM	Bypass valve opened
1/18/2010	2:23:48 PM	Helium valve opened
1/18/2010	2:25:13 PM	Helium valve closed
1/18/2010	2:25:15 PM	Bypass valve closed
1/18/2010	2:26:08 PM	Bypass solenoid MFC set to  0.000000
1/18/2010	2:26:11 PM	Bypass valve opened
1/18/2010	2:27:24 PM	Main Vac valve opened
1/18/2010	2:28:32 PM	Bypass valve closed
1/18/2010	2:28:33 PM	Main Vac valve closed
1/18/2010	2:28:50 PM	Bypass valve opened
1/18/2010	2:28:50 PM	Main Vac valve opened
1/18/2010	2:34:15 PM	Bypass valve closed
1/18/2010	2:34:16 PM	Main Vac valve closed
1/18/2010	2:34:30 PM	Bypass valve opened
1/18/2010	2:34:31 PM	Main Vac valve opened
1/18/2010	2:35:40 PM	Main Vac valve closed
1/18/2010	2:35:59 PM	Bypass solenoid MFC set to  760.000000
1/18/2010	2:36:00 PM	H2 valve opened
1/18/2010	2:37:35 PM	Bypass valve closed
1/18/2010	2:37:36 PM	Bubbler valve opened
1/18/2010	2:59:30 PM	SiCl4 pre valve opened
1/18/2010	2:59:30 PM	SiCl4 post valve opened
1/18/2010	2:59:41 PM	Helium valve closed
1/18/2010	2:59:41 PM	H2 valve closed
1/18/2010	2:59:41 PM	BCl3 valve closed
1/18/2010	2:59:41 PM	PH3 valve closed
1/18/2010	2:59:41 PM	SiCl4 pre valve closed
1/18/2010	2:59:41 PM	SiCl4 post valve closed
1/18/2010	2:59:41 PM	Main Vac valve closed
1/18/2010	2:59:41 PM	Bubbler valve closed
1/18/2010	2:59:41 PM	Bypass valve opened
1/18/2010	2:59:41 PM	Helium MFC set to  0.000000
1/18/2010	2:59:41 PM	H2 MFC set to  0.000000
1/18/2010	2:59:41 PM	BCl3 MFC set to  0.000000
1/18/2010	2:59:41 PM	PHl3 MFC set to  0.000000
1/18/2010	2:59:41 PM	SiCl4 MFC set to  0.000000
1/18/2010	2:59:41 PM	Bypass solenoid MFC set to  760.000000
1/18/2010	2:59:41 PM	Tube furnace set to 0
1/18/2010	2:59:45 PM	Baratron reads 906.692461 Torr.  Emergency exit.
1/18/2010	2:59:45 PM	Program exited cleanly
1/18/2010	3:00:06 PM	Program started normally
1/18/2010	3:00:11 PM	Bypass solenoid MFC set to  760.000000
1/18/2010	3:00:15 PM	H2 valve opened
1/18/2010	3:01:15 PM	Bubbler valve opened
1/18/2010	3:03:19 PM	H2 MFC set to  100.000000
1/18/2010	3:03:51 PM	H2 MFC set to  500.000000
1/18/2010	3:03:57 PM	H2 valve closed
1/18/2010	3:04:05 PM	Bubbler valve closed
1/18/2010	3:04:08 PM	Bypass valve opened
1/18/2010	3:04:10 PM	Bypass valve closed
1/18/2010	3:04:11 PM	Bypass valve opened
1/18/2010	3:04:12 PM	Bypass valve closed
1/18/2010	3:04:16 PM	H2 valve opened
1/18/2010	3:04:19 PM	Bubbler valve opened
1/18/2010	3:04:23 PM	Bubbler valve closed
1/18/2010	3:04:23 PM	H2 valve closed
1/18/2010	3:04:24 PM	Bypass valve opened
1/18/2010	3:04:25 PM	Bypass valve closed
1/18/2010	3:04:49 PM	Bypass valve opened
1/18/2010	3:04:49 PM	Bypass valve closed
1/18/2010	3:04:53 PM	H2 valve opened
1/18/2010	3:05:00 PM	Bubbler valve opened
1/18/2010	3:05:03 PM	Bubbler valve closed
1/18/2010	3:05:04 PM	H2 valve closed
1/18/2010	3:06:29 PM	Bubbler valve opened
1/18/2010	3:06:50 PM	H2 valve opened
1/18/2010	3:06:50 PM	H2 valve closed
1/18/2010	3:07:02 PM	Bubbler valve closed
1/18/2010	3:08:04 PM	Bypass valve opened
1/18/2010	3:08:11 PM	Bypass solenoid MFC set to  0.000000
1/18/2010	3:09:50 PM	Main Vac valve opened
1/18/2010	4:11:23 PM	Helium MFC set to  500.000000
1/18/2010	4:11:28 PM	Bypass solenoid MFC set to  760.000000
1/18/2010	4:11:30 PM	Main Vac valve closed
1/18/2010	4:11:32 PM	Helium valve opened
1/18/2010	4:12:56 PM	Helium valve closed
1/18/2010	4:12:56 PM	Bypass valve closed
1/18/2010	4:15:56 PM	Bypass solenoid MFC set to  0.000000
1/18/2010	4:15:58 PM	Bypass valve opened
1/18/2010	4:17:39 PM	Main Vac valve opened
1/18/2010	6:33:49 PM	Bypass valve closed
1/18/2010	6:33:50 PM	Main Vac valve closed
1/18/2010	6:34:59 PM	Bypass solenoid MFC set to  760.000000
1/18/2010	6:35:00 PM	Bypass valve opened
1/18/2010	6:35:01 PM	Helium valve opened
1/18/2010	6:36:37 PM	Helium MFC set to  200.000000
1/18/2010	6:36:38 PM	Bypass valve closed
1/18/2010	6:36:40 PM	Bubbler valve opened
1/18/2010	6:36:44 PM	Bubbler valve closed
1/18/2010	6:36:45 PM	Bubbler valve opened
1/18/2010	6:36:52 PM	Bubbler valve closed
1/18/2010	6:36:53 PM	Bypass valve opened
1/18/2010	6:36:56 PM	Bypass valve closed
1/18/2010	6:36:59 PM	Bypass valve opened
1/18/2010	6:37:04 PM	Helium valve closed
1/18/2010	6:37:05 PM	Bypass valve closed
1/18/2010	6:52:35 PM	Program started after a nonstandard shutdown
1/18/2010	6:52:44 PM	Helium MFC set to  200.000000
1/18/2010	6:52:47 PM	Helium valve opened
1/18/2010	6:52:57 PM	Bubbler valve opened
1/18/2010	6:53:20 PM	Helium MFC set to  500.000000
1/18/2010	6:53:26 PM	Helium valve closed
1/18/2010	6:53:31 PM	Bubbler valve closed
1/18/2010	8:59:25 PM	Helium valve opened
1/18/2010	8:59:30 PM	Bubbler valve opened
1/18/2010	8:59:31 PM	Bubbler valve closed
1/18/2010	8:59:33 PM	Helium valve closed
1/18/2010	8:59:39 PM	Bypass valve opened
1/18/2010	8:59:40 PM	Bypass valve closed
1/18/2010	8:59:55 PM	Helium valve opened
1/18/2010	9:01:46 PM	Helium valve closed
1/18/2010	9:01:51 PM	Bypass valve opened
1/18/2010	9:01:57 PM	Bypass solenoid MFC set to  0.000000
1/18/2010	9:02:52 PM	Main Vac valve opened
1/18/2010	10:15:51 PM	Main Vac valve closed
1/18/2010	10:15:51 PM	Bypass valve closed
1/18/2010	10:15:53 PM	Helium MFC set to  500.000000
1/18/2010	10:15:55 PM	Helium valve opened
1/18/2010	10:16:03 PM	Bypass solenoid MFC set to  760.000000
1/18/2010	10:16:06 PM	Bypass valve opened
1/18/2010	10:17:42 PM	Bypass valve closed
1/18/2010	10:19:16 PM	Helium valve closed
1/18/2010	10:19:42 PM	Bypass solenoid MFC set to  0.000000
1/18/2010	10:19:43 PM	Bypass valve opened
1/18/2010	10:20:08 PM	Main Vac valve opened
